SVG

661 HT

Lithography Mask / Wafer Handling:SVG 661 HT family

Research Quality: 20% complete

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661 HT — Inventory photo — Fig. 01661 HTInventory photo^[1]

Wafer size

Mask / Wafer Handling:

Performance

Integrated Uniformity Tester^[1]

Optics

Photo Exposure^[1]

What is it?

What do the numbers mean?

Wafer handling6

Wafer size: Mask / Wafer Handling:^[1]
Wafer size: Elevator Platforms for 150 mm Wafer Fluoroware Cassettes^[1]
Wafer size: 150 mm Wafer Handling & processing Capability with Extended Bellows Chuck^[1]; Pellicle Protection Mask Cassette System for 7.25" Round Masks^[1]; One 7.25" Round Mask Carrier and Cassette^[1]
Wafer size: Extended Life Mask X, Wafer X, & Pre Aligner Anchor Flexures^[1]

Optics & imaging3

Process: Photo Exposure^[1]; Optical:^[1]; High Throughput Coated Optics (HT)^[1]

Performance2

Integrated Uniformity Tester^[1]

Accurate?

AUDIT (Automated Uniformity Testing)^[1]

Accurate?

Control & software2

Software:^[1]

Accurate?

OS 2000 Hardware and Software v29.x or Higher^[1]

Accurate?

Configuration & options7

Refurbished in 2022^[1]
Heat Exchanger / Chiller: Blower^[1]; SEMI-GEM E 30 & HSMS # 37 Compliant Host Link^[1]; Electronic Motorized Carousel Arm^[1]; UV4 Filter Set^[1]; Narrow Band Secondary (UV4)^[1]; Focus / Viewing / Mag:^[1]

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 661 HT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 661 HT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 661 HT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 661 HT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 661 HT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 661 HT is not on record.
Answerable by: an OEM datasheet or a fab qualification report