Waferpedia

Applied Materials

9500 XR 200 S

Applied Materials PI 9500 family
Research Quality: 20% complete
9500 XR 200 S — Inventory photo
Fig. 019500 XR 200 SInventory photo[1]

Power

3 Phase + Neutral[1]

Vacuum

Pump Config:[1]

Gas delivery

Gas Box:[1]

What is it?

What do the numbers mean?

Power & electrical3

Phase
3 Phase + Neutral[1]
Accurate?
50/60 Hz[1]
Accurate?
Voltage
208 V[1]
Accurate?

Vacuum & pumping4

Pump Config:[1]
Accurate?
Chamber
CT-10 Cryos[1]
Accurate?
Source Turbo
STP-1000C[1]
Accurate?
Mrs Turbo
STP-361C[1]
Accurate?

Wafer handling1

Wafer Loader
QDP80 w/ EH500 Blower[1]
Accurate?

Gas & chemistry1

Gas Box:[1]
Accurate?

Control & software1

Software
4.06[1]
Accurate?

Configuration & options10

CPU
MVME162-P244LSE[1]
Accurate?
BF3
SDS[1]
Accurate?
PH3
SDS[1]
Accurate?
AsH3
SDS[1]
Accurate?
SiF4
SDS[1]
Accurate?
Argon
External Feed[1]
Accurate?
Source Backing
QDP40[1]
Accurate?
Source Type
IHC[1]
Accurate?
Enlarged Chamber[1]
Accurate?
Oven Capabilities
Oven fitted to source[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase + Neutral[1]
  • Configuration50/60 Hz[1]
  • Voltage208 V[1]
  • ConfigurationGas Box:[1]
  • ConfigurationPump Config:[1]
  • ChamberCT-10 Cryos[1]
  • Source TurboSTP-1000C[1]
  • Mrs TurboSTP-361C[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 9500 XR 200 S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9500 XR 200 S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 9500 XR 200 S are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 9500 XR 200 S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 9500 XR 200 S are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 9500 XR 200 S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →