Applied Materials

Endura CL

Deposition Applied Materials Endura family

Research Quality: 20% complete

LinkedIn X Email

Endura CL — Inventory photo — Fig. 01Endura CLInventory photo^[1]

What is it?

What do the numbers mean?

Power & electrical6

Phase: 3 Phase^[1]; 50/60 Hz^[1]
Voltage: 400V^[1]; RF Power Supply^[1]; Source DC Power Supply^[1]; Generator Rack (x3)^[1]

Control & software1

Chamber: D (PC-XT), 1 (IMP), 2/3 (TxZ)^[2]

Configuration & options18

Preclean^[3]; ESIP TAN (No Target)^[4]; Degas STD^[5]; 4 wires^[1]; Chamber 1:^[1]; SIP-TA(N)^[1]; Chamber 2:^[1]; SIP-CU^[1]; Chamber 3:^[1]; Chamber 4:^[1]; process type None^[1]; Chamber C:^[1]; PCXT^[1]; Chamber D:^[1]
Chamber E: Degas^[1]
Chamber F: Degas^[1]
SUB Rack: BULE Distribution Rack^[1]; Ti^[6]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Configuration50/60 Hz^[1]
Voltage400V^[1]
ConfigurationRF Power Supply^[1]
ConfigurationSource DC Power Supply^[1]
ConfigurationGenerator Rack (x3)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Endura CL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura CL are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Endura CL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Endura CL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Endura CL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Endura CL is not on record.
Answerable by: an OEM datasheet or a fab qualification report