Applied Materials

P 5000 MxP+

Etch Applied Materials P 5000 MxP+ family

Research Quality: 30% complete

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P 5000 MxP+ — Inventory photo — Fig. 01P 5000 MxP+Inventory photo^[1]

Power

208 V, 125.0 A, 50/60 Hz, 3 Phase^[1]

Vacuum

1 Torr^[1]

What is it?

Applied Materials P 5000 MxP+ is an etcher with source-listed wafer sizes of 6-inch and 8-inch.

What do the numbers mean?

Power & electrical9

Voltage: 208 V, 125.0 A, 50/60 Hz, 3 Phase^[1]
Largest Load Ampere Rating: 125 Amps^[1]
Full Load Current: 250 Amps^[1]
Interrupt Current: 10,000 Amps I.C.^[1]
RF Generator: OEM 12 B^[1]; RF Match^[1]
Voltage: 208 V, 50/60 Hz, 3 Phase^[2]
Full Load Current: 120 Amps^[2]
Largest Load Ampere Rating: 32 Amps^[2]

Vacuum & pumping3

Baraton: 1 Torr^[1]; Edwards Turbo / Controller^[1]
Baratron: 1 Torr^[1]

Wafer handling2

Wafer Set Size: 8"^[1]; Cassette to Cassette^[2]

Configuration & options10

MAximum Ampere Rating: 90 KVA^[1]
Chamber A: MxP+ Etch^[1]
Chamber B: MxP+ Etch^[1]
Chamber C: MxP+ Etch^[1]; Chamber A:^[1]; Throttle Valve^[1]
Slit Valve: Standard^[1]; Lift Pin^[1]; Process Kit^[1]; Chamber B:^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208 V, 125.0 A, 50/60 Hz, 3 Phase^[1]
Largest Load Ampere Rating125 Amps^[1]
Full Load Current250 Amps^[1]
Interrupt Current10,000 Amps I.C.^[1]
RF GeneratorOEM 12 B^[1]
ConfigurationRF Match^[1]
Baraton1 Torr^[1]
ConfigurationEdwards Turbo / Controller^[1]
Baratron1 Torr^[1]
Voltage208 V, 50/60 Hz, 3 Phase^[2]
Full Load Current120 Amps^[2]
Largest Load Ampere Rating32 Amps^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the P 5000 MxP+ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 5000 MxP+ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 5000 MxP+ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 5000 MxP+ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 5000 MxP+ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 5000 MxP+ is not on record.
Answerable by: an OEM datasheet or a fab qualification report