Waferpedia

Applied Materials

xR 200 S

xR 200 S — Inventory photo
Fig. 01xR 200 SInventory photo[1]

Power

3 Phase[1]

Vacuum

Cryo pump[1]

Gas delivery

Gas cylinders removed[1]

What is it?

What do the numbers mean?

Power & electrical2

Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?

Vacuum & pumping1

Cryo pump[1]
Accurate?

Wafer handling1

Last Wafer Processed
May 2024[1]
Accurate?

Gas & chemistry2

Gas cylinders removed[1]
Accurate?
Gas lines and beamline have been purged with N2[1]
Accurate?

Configuration & options8

Fully Automated[1]
Accurate?
Includes Spare Parts:[1]
Accurate?
3 spare sources[1]
Accurate?
2 bushings[1]
Accurate?
3 MRS (Mass Revolving System)[1]
Accurate?
2 source housing[1]
Accurate?
Flight tube[1]
Accurate?
Many parts for the source maintenance & tool maintenance[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • ConfigurationGas cylinders removed[1]
  • ConfigurationGas lines and beamline have been purged with N2[1]
  • ConfigurationCryo pump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the xR 200 S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the xR 200 S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the xR 200 S are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the xR 200 S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the xR 200 S are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the xR 200 S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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