ASM
E 2000 EPI Reactor
Plate 01ASM Epsilon E2000
Saxony Thermal GmbHWatch on YouTube
What is it?
What do the numbers mean?
Configuration & options10
- E 2 Upgraded to E 2000[1]
- MPI[1]
- Fully Function when removed from Fab[1]
- Refurbished in 2008[1]
- LPE Bubbler[1]
- Upgraded from Epsilon E2 to E2000[2]
- Right Handed Config[2]
- Atmospheric (ATM)[2]
- Service Console Integrated in Service Door[2]
- Main Power Distribution Cabinet including New Style SCRs[2]
Vintage & configurations
- 2008Refurbished[1]
Refurbished in 2008.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the E 2000 EPI Reactor are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the E 2000 EPI Reactor are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 2000 EPI Reactor are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the E 2000 EPI Reactor are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the E 2000 EPI Reactor is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the E 2000 EPI Reactor are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
Last updated Jul 29, 2026.
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