ASML
TWINSCAN NXE:3300
The TWINSCAN NXE:3300 is an extreme ultraviolet (EUV) lithography system from ASML. The NXE:3300 was the first EUV production system, shipped in 2013. The NXE:3300 uses EUV light at 13.5 nm wavelength and an NA of 0.33.[1]
Produced
2013–
Optics
13.5 nm[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- High-volume manufacturing of advanced Logic and Memory chips
- Printing foundation layers for 7 nm, 5 nm, and 3 nm nodes
What do the numbers mean?
Optics & imaging4
Configuration & options1
Vintage & configurations
- 2013Production start[1]
First EUV production system shipped
What replaced it?
Related models
- predecessorASML TWINSCAN NXE:3100— Pre-production EUV system shipped in 2010, preceding the production NXE:3300source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the TWINSCAN NXE:3300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the TWINSCAN NXE:3300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TWINSCAN NXE:3300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TWINSCAN NXE:3300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TWINSCAN NXE:3300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TWINSCAN NXE:3300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]asml.com — asml.comasml.com
Last updated Sep 22, 2026.
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