Axcelis

GSD 200

Ion Implantation Axcelis GSD 200 family

Research Quality: 20% complete

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GSD 200 — Inventory photo — Fig. 01GSD 200Inventory photo^[1]

Vacuum

Unit MFC^[1]

Gas delivery

(SDS): Unit MFC^[1]

What is it?

What do the numbers mean?

Power & electrical1

Source Analyzer: Triple Indexed Mass Analysis Magnet & Power Supply^[1]

Vacuum & pumping2

GeF 4 (High Pressure): Unit MFC^[1]
Argon (High Pressure): Unit MFC^[1]

Gas & chemistry2

PH 3: (SDS): Unit MFC^[1]
XE: Unit MFC ( E Shower not use)^[1]

Control & software1

Charge Control: E-Shwr IV (Fwd Bias) / P/N: 1183280^[1]

Configuration & options14

Source Head: Enhanced Source w/ Tantalum^[1]
Extraction: 90 kV / 90 kV^[1]
RGA Resolver: Port^[1]
RGA Chamber: Port^[1]
HYT: Particle Detection Monitor^[1]; MER^[1]
Post Accel Elect: P/N: 1182480^[1]
Flag Faraday: Standard^[1]
SMIF: ASYST ARM 2200^[1]; Affinity Disk Chiller w/ Remote up to 50 ft^[1]
Compressor: 9600 & 8200^[1]; Ebara 40 x 20 (2)^[1]; Seiko Seiki H 2000 C^[1]; CTI OB 8^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Source AnalyzerTriple Indexed Mass Analysis Magnet & Power Supply^[1]
GeF 4 (High Pressure)Unit MFC^[1]
PH 3(SDS): Unit MFC^[1]
XEUnit MFC ( E Shower not use)^[1]
Argon (High Pressure)Unit MFC^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the GSD 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GSD 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GSD 200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GSD 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GSD 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GSD 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report