Axcelis GSD 200

Models in this family

1. 

   GSD 200
2. 

   GSD 200 E 2 High Current

   The Axcelis GSD 200 E 2 is a high current implanter with source-stated wafer sizes of 6 inch and 8 inch.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   GSD 200 E 2	—	—	One source states 8 inch wafer size and lists software, CIM, process, handler, factory interface, and option details; another source states 6 inch wafer size.	Equipment inventory listing[1]

3. 

   GSD 200 E 2 Ion

Sources