Axcelis

NV GSD 200 Ion

Ion Implantation Axcelis NV GSD 200 family

Research Quality: 20% complete

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NV GSD 200 Ion — Inventory photo — Fig. 01NV GSD 200 IonInventory photo^[1]

Power

3 Phase^[1]

Performance

210 pieces/hour^[1]

Gas delivery

B/As/Ar^[1]

What is it?

What do the numbers mean?

Power & electrical3

Phase: 3 Phase^[1]
Voltage: 208V, 710A^[1]; Post acceleration high voltage, 80 KEV^[1]

Wafer handling2

(25) Slots cassette^[1]

Accurate?

(4) cassettes capacity^[1]

Accurate?

Gas & chemistry3

Gases: B/As/Ar^[1]; (2) SDS gas lines (ASH3 and PH3)^[1]; (2) HP Gas lines (BF3 and ARGON)^[1]

Performance1

Throughput: 210 pieces/hour^[1]

Control & software2

VME 177 cell controller^[1]

Accurate?

Real time patented dose controller^[1]

Accurate?

Configuration & options9

Total energy: 200 KEV^[1]; Features:^[1]; ELS source head^[1]; (2) SUN Workstations^[1]; P-Shower Electron shower^[1]; Belt type rotary drive^[1]; Variable implant angle, 2-Axis^[1]; 5E11~1E16 Ions/cm2 dose range^[1]; Arm Std Arm 150mm^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Voltage208V, 710A^[1]
GasesB/As/Ar^[1]
Configuration(2) SDS gas lines (ASH3 and PH3)^[1]
Configuration(2) HP Gas lines (BF3 and ARGON)^[1]
ConfigurationPost acceleration high voltage, 80 KEV^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the NV GSD 200 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD 200 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD 200 Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD 200 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD 200 Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD 200 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report