Axcelis NV GSD 200

Models in this family

1. 

   200 ACU
2. 

   200 MCU

   The Axcelis 200 MCU is an 8-inch asher.

3. 200 PCU

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Fusion 200 PCU	—	—	—	exapro.com[1]
   Fusion 200 PCU-P	—	2000	Described as a UV Bake version; source lists 200 mm open cassette loading, 380 / 220 VAC, through-the-wall type, and a 2-d robot type.	fabsurplus.com[2]

4. 

   200 PCU Photoresist Stabilizer
5. 

   NV GSD 200

   The Axcelis NV GSD 200 is an ion implanter described with 208 V, 3 phase, 50/60 Hz power and 35 kVa input.

6. 

   NV GSD 200 E 2 Ion
7. 

   NV GSD 200 High Current
8. 

   NV GSD 200 Ion

Sources