Axcelis NV GSD 200

Models in this family

1. 

   200 ACU

   The Axcelis 200 ACU is an asher or plasma asher used in semiconductor processing.

2. 

   200 MCU

   The Axcelis 200 MCU is an 8-inch asher.

3. 200 PCU

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Fusion 200 PCU	—	—	—	exapro.com[1]
   Fusion 200 PCU-P	—	2000	Described as a UV Bake version; source lists 200 mm open cassette loading, 380 / 220 VAC, through-the-wall type, and a 2-d robot type.	fabsurplus.com[2]

4. 

   200 PCU Photoresist Stabilizer
5. 

   NV GSD 200

   The Axcelis NV GSD 200 is an ion implanter described with 208 V, 3 phase, 50/60 Hz power and 35 kVa input.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   NV GSD 200 E 2 Ion	—	—	An ion implanter for 8 inch wafers.	waferpedia.com[3]
   NV GSD 200 High Current	—	—	A high current ion implanter.	waferpedia.com[3]
   NV GSD 200 Ion	—	—	An ion implanter for 6-inch wafers with a total energy of 200 KEV and a throughput of 210 pieces per hour.	waferpedia.com[3]

6. 

   NV GSD 200 E 2 Ion

   The Axcelis NV GSD 200 E 2 Ion is an ion implanter for 8 inch wafers.

7. 

   NV GSD 200 High Current

   The Axcelis NV GSD 200 High Current is a high current ion implanter.

8. 

   NV GSD 200 Ion

   The Axcelis NV GSD 200 is an ion implanter for 6-inch wafers with a total energy of 200 KEV and a throughput of 210 pieces per hour.

Sources