Besi
2200 EVO Flexible Multi-Chip
Wafer size
Wafer Table
Vacuum
Internal Vacuum Pump[1]
What is it?
What do the numbers mean?
Vacuum & pumping1
- Internal Vacuum Pump[1]
Wafer handling1
Configuration & options9
- Tool Changer Unit 7 Slots[1]
- Main – Musashi Super Sigma V2[1]
- P-part at Main AXIS[1]
- Microscope[1]
- 12" (FF-123) adapter for 2" and/or 4" Wafflepacks and Gelpaks (4x 2" and 2x 4")[1]
- 2" WP-Adapter (12"-FF123) - 23 up - side clamp (any WT)[1]
- 4" WP-Adapter - (12"-FF123) - 7 up - side clamp (std WT)[1]
- 2" GP-Adapter - (12"-FF123) - 22 up - (any WT)[1]
- 4" GP-Adapter - 12" (FF123) - 7 up - (std WT)[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationInternal Vacuum Pump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2200 EVO Flexible Multi-Chip are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2200 EVO Flexible Multi-Chip are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2200 EVO Flexible Multi-Chip are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2200 EVO Flexible Multi-Chip are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2200 EVO Flexible Multi-Chip are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2200 EVO Flexible Multi-Chip is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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