Canon
MPA 600 FA Projection
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Canon MPA 600 FA Projection is a lithography projection aligner. Canon MPA 600 FA Projection is a 1X mirror projection mask aligner. Canon MPA 600 FA Projection supports wafer sizes of 4", 5", and 6".[1][2]
Power
2 kW high pressure mercury lamp[1]
Performance
Spot Beam / Sheet Beam[1]
Gas delivery
1.5 um (using positive resist)[1]
Optics
1X Mirror Projection Mask Aligner[1]
What it is
How it works
Where it fits in the process flow
The Canon MPA 600 FA supports cassette-to-cassette operation and backside wafer handling, which places it in a production alignment and exposure flow rather than a manual contact-only workflow.[1][2]
The Canon MPA 600 FA is specified for wafer sizes of 4 inch, 5 inch, and 6 inch and mask sizes of 5 inch, 6 inch, and 7 inch.[1][2]
Applications
What do the numbers mean?
Power & electrical2
- Intensity
- (@ 1800 watts power output) 4" wafer - more than 700 mW, 5" wafer - more than 650 mW, 6" wafer - more than 600 mW[1]
Wafer handling2
Gas & chemistry1
Optics & imaging5
Performance2
Control & software2
- Constant Temperature Control (CTC)
- Monitors and controls system temperature within +-.3 degrees C.[1]
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Canon MPA 600 FA support?
The Canon MPA 600 FA is specified for 4 inch, 5 inch, and 6 inch wafers.[1][2]
What exposure light source does the Canon MPA 600 FA use?
The Canon MPA 600 FA uses a 2 kW high pressure mercury lamp.[1][2]
Not publicly documented
The following facts about the MPA 600 FA Projection are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MPA 600 FA Projection are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MPA 600 FA Projection are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MPA 600 FA Projection are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MPA 600 FA Projection are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MPA 600 FA Projection is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]servtechinc.com — servtechinc.comservtechinc.com
- [2]Canon MPA 600FA - Mirror Projection Aligner | SemiStar — semistarcorp.comsemistarcorp.com
- [3]Inventory photo
Last updated Oct 8, 2026.
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