CHA
SE-1000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Plate 01CHA SE 1000 Inv# 57367
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Wafer size
10 in.
Vacuum
High vacuum deposition system[3]
What is it?
Applications
The CHA SE-1000 offers lift-off fixturing as a popular option. The CHA SE-1000 also supports commercially available sources including single-beam and multiple-beam configurations as well as resistance and sputtering sources.[3]
What do the numbers mean?
Vacuum & pumping2
Wafer handling3
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What chamber and baseplate configuration is typical for the CHA SE-1000?
The CHA SE-1000 is typically equipped with a 25.5-inch diameter water-cooled bell jar and a 26-inch diameter stainless steel baseplate.[3][4]
What vacuum level is specified for the CHA SE-1000?
The CHA SE-1000 is specified with an ultimate vacuum in the 10-8 torr range.[3]
Not publicly documented
The following facts about the SE-1000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SE-1000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SE-1000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SE-1000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SE-1000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SE-1000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]chaindustries.com — chaindustries.comchaindustries.com
- [4]semiconductoronline.com — semiconductoronline.comsemiconductoronline.com
Last updated Oct 17, 2026.
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