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CHA

Solution E-Beam

DepositionCHA Solution E-Beam family
Research Quality: 50% complete
Solution E-Beam — Inventory photo
Fig. 01Solution E-BeamInventory photo[1]

What is it?

The CHA Solution E-Beam Evaporator is an E-beam evaporator with a listed Glassman power supply.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Glassman power supply PS/LQ10N1.00GB4 has an issue

What do the numbers mean?

Power & electrical5

Voltage
220 VAC[1]
Accurate?
Phase
3 Phase[1]
Accurate?
Frequency
60 Hz[1]
Accurate?
100 Amps[1]
Accurate?
Glassman power supply  PS/LQ10N1.00GB4 has an issue[1]
Accurate?

Configuration & options1

5 Wire[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage220 VAC[1]
  • Phase3 Phase[1]
  • Frequency60 Hz[1]
  • Configuration100 Amps[1]
  • ConfigurationGlassman power supply  PS/LQ10N1.00GB4 has an issue[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Solution E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Solution E-Beam are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Solution E-Beam are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Solution E-Beam are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Solution E-Beam is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Solution E-Beam are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Film Formationtudelft.nltudelft.nl
  3. [3]Physical Vapor Depositionnanolab.berkeley.edunanolab.berkeley.edu
  4. [4]E-Beam Metal Evaporator | Shared Materials Instrumentation Facilitysmif.pratt.duke.edusmif.pratt.duke.edu
  5. [5]CHA Solution E-Beam Evaporator | UCLA Nanolabnanolab.ucla.edunanolab.ucla.edu
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Last updated Jul 29, 2026.

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