Waferpedia

Tool family

Denton Vacuum Discovery

Models in this family

  1. Denton Discovery 18 is a sputter deposition system for metals, alloys, and insulating thin films with user-configurable deposition settings.

  2. The Denton Discovery Cathode Deposition System is a 12.0-inch sputtering system with planetary load lock and robot loading assemblies.

All entries

  1. DiscoveryDenton Vacuum
    CategoryDeposition
    17 specs
  2. Discovery 18Denton Vacuum

    Denton Discovery 18 is a sputter deposition system for metals, alloys, and insulating thin films with user-configurable deposition settings.

    CategoryDepositionWafer6-inch diameter stage
    14 specs
  3. Discovery CathodeDenton Vacuum

    The Denton Discovery Cathode Deposition System is a 12.0-inch sputtering system with planetary load lock and robot loading assemblies.

    CategoryDeposition
    20 specs