Denton Vacuum
Explorer 14 RF Sputterer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Denton Explorer 14 RF Sputterer is an RF sputterer.[1]
What it is
General reference — not yet source-verifiedRF sputterers are physical vapor deposition systems used to deposit thin films of insulating and conducting materials.
How it works
General reference — not yet source-verifiedIn RF sputtering, a target material is bombarded with ions from a plasma sustained by a radio-frequency electric field.
The target atoms are ejected and deposited on a substrate placed in the vacuum chamber.
Where it fits in the process flow
General reference — not yet source-verifiedSputter deposition is typically used after photolithography to deposit thin films for interconnects, contacts, and passivation layers.
The process can be part of front-end or back-end fabrication steps depending on the material being deposited.
Applications
General reference — not yet source-verifiedApplications include deposition of metal films for electrodes, dielectric films for capacitors, and magnetic films for data storage.
What do the numbers mean?
No specifications recorded yet
Be the first to add cited specifications for this tool.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Explorer 14 RF Sputterer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the Explorer 14 RF Sputterer are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Explorer 14 RF Sputterer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Explorer 14 RF Sputterer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Explorer 14 RF Sputterer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Explorer 14 RF Sputterer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Aug 14, 2026.
Compare with similar tools
View all →
The Oxford 100 Nitride is a deposition system manufactured by Oxford Instruments for depositing nitride layers.
