Denton Vacuum
Integrity 14 Thermal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Denton Vacuum Integrity 14 Thermal is a thermal evaporation deposition system. The Integrity 14 Thermal is used for deposition of metal and alloy thin films, electrode coating, optical thin films, and thin-film process development. The Integrity 14 Thermal features a CTI 8 cryopump, a dual-source thermal evaporator, and an Inficon crystal deposition rate monitor.[1][2]
What it is
Where it fits in the process flow
Applications
What do the numbers mean?
Vacuum & pumping3
- with Cryo pump[3]
Wafer handling1
- Substrate Holder
- Single-dome rotating substrate holder with variable-speed control[2]2 sources
Performance1
Dimensions & facilities4
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Integrity 14 Thermal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity 14 Thermal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Integrity 14 Thermal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Integrity 14 Thermal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Integrity 14 Thermal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity 14 Thermal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]his-tek.com — his-tek.comhis-tek.com
- [3]Inventory photo
Last updated Oct 12, 2026.
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