Denton Vacuum
Integrity-29
The Denton Vacuum Integrity-29 is an ophthalmic coating system. The Denton Vacuum Integrity-29 uses a 29-inch-wide by 29-inch-deep by 32-inch-high 304 stainless-steel vacuum chamber. The Denton Vacuum Integrity-29 includes integrated pumping, gauging, gas control, substrate rotation, substrate heating, ion-source, electron-beam evaporation, low-voltage resistance evaporation, source shutter, deposition control, and computer automation subsystems.[1]
What it is
The Denton Vacuum Integrity-29 is an ophthalmic coating system. The Denton Vacuum Integrity-29 is built around a 304 stainless steel vacuum chamber that measures 29 inches wide by 29 inches deep by 32 inches high. The Denton Vacuum Integrity-29 includes vacuum chamber, pumping, vacuum gauging, process gas control, substrate fixturing and rotation, a substrate heater system, a CC-105 ion source, an electron beam evaporation source, low voltage resistance sources, source shuttering, deposition control, and control and automation. The Denton Vacuum Integrity-29 uses two stand-alone NEMA 12 enclosures for system controllers.[1][3]
How it works
General reference — not yet source-verifiedVacuum optical coaters evacuate a process chamber so evaporated material can travel to the substrate with limited gas-phase scattering. Vacuum optical coaters commonly use thermal evaporation or electron beam evaporation to generate coating vapor, and some systems also use ion assistance or controlled process gases to influence film properties. Substrate fixtures in this class rotate the parts through the vapor field to improve coating uniformity across lens surfaces. Deposition control in this class commonly relies on crystal-based monitoring and recipe-driven automation.
Where it fits in the process flow
General reference — not yet source-verifiedOphthalmic coating systems sit in the finishing portion of lens manufacturing. Ophthalmic coating systems generally receive cleaned and prepared lens substrates and send coated lenses onward to inspection, edge handling, and final product finishing. Ophthalmic coating steps are commonly coordinated with prior surface preparation and with later quality checks for appearance, adhesion, and optical performance.
What can it run?
Process applications and technology nodes documented for this tool.
- Ophthalmic coating
What do the numbers mean?
Power & electrical3
- Low voltage resistance source power supply
- Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Vacuum & pumping7
- Vacuum chamber door
- Full-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping system
- APD-10SC cryogenic pump with APD Displex water-cooled compressor and Alcatel 2063 two-stage rotary vane mechanical pump[1]
- Vacuum gauging controller
- Granville-Phillips GP307 ionization/convectron gauge controller[1]
Wafer handling1
- Substrate rotation
- Direct drive, single rotation fixture with bearing-supported feedthrough and 1.0 in diameter shaft[1]
Gas & chemistry1
- Process gas control
- Two MKS 2179 mass flow controllers, each capable of 0-100 sccm in fixed flow mode[1]
Optics & imaging1
- Electron beam evaporation source
- TFI-Telemark TFI-261-06 six-pocket rotary crucible electron beam source[1]
Control & software3
- Control software interface
- GE Cimplicity software via RS-485 interface to a GE Fanuc 9030 PLC[1]
Configuration & options1
What replaced it?
Related models
- siblingDenton Vacuum Integrity-20— Listed in the same Integrity system capacity chart.source[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum chamber material304 stainless steel[1]
- Vacuum chamber dimensions29 in wide x 29 in deep x 32 in high[1]
- Vacuum chamber doorFull-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping systemAPD-10SC cryogenic pump with APD Displex water-cooled compressor and Alcatel 2063 two-stage rotary vane mechanical pump[1]
- Additional vacuum coolingPolycold PFC330ST cryogenic cooler[1]
- Vacuum gauging controllerGranville-Phillips GP307 ionization/convectron gauge controller[1]
- Process gas controlTwo MKS 2179 mass flow controllers, each capable of 0-100 sccm in fixed flow mode[1]
- Substrate heaterOne 3 kW radiant quartz heater assembly[1]
- Ion sourceDenton Vacuum CC-105 cold cathode ion source[1]
- Electron beam power supplyTFI-Telemark ST-4 4.0 kW electron beam gun power supply[1]
- Low voltage resistance source power supplyDenton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Denton Vacuum Integrity-29?
The Denton Vacuum Integrity-29 is an ophthalmic coating system.[1][3]
What pumping hardware does the Denton Vacuum Integrity-29 use?
The Denton Vacuum Integrity-29 uses an APD-10SC cryogenic pump with an APD Displex water-cooled compressor, an Alcatel 2063 two-stage rotary vane mechanical pump, and a Polycold PFC330ST cryogenic cooler for the chamber-mounted Meissner plate.[1][3]
How are process gases controlled on the Denton Vacuum Integrity-29?
The Denton Vacuum Integrity-29 uses two MKS 2179 mass flow controllers. One controller introduces gas into the process chamber via the ion source, and the other introduces gas directly into the process chamber. Each controller is capable of controlling 0 to 100 sccm flow in fixed flow mode.[1][3]
Not publicly documented
The following facts about the Integrity-29 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-29 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Integrity-29 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Integrity-29 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Integrity-29 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity-29 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.orgweb.archive.org
- [3]Integrity-29 — Denton Vacuum | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 16, 2026.
