Denton Vacuum
Integrity-29
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Ophthalmic coating
What do the numbers mean?
Power & electrical3
- Low voltage resistance source power supply
- Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Vacuum & pumping7
- Vacuum chamber door
- Full-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping system
- APD-10SC cryogenic pump with APD Displex water-cooled compressor and Alcatel 2063 two-stage rotary vane mechanical pump[1]
- Vacuum gauging controller
- Granville-Phillips GP307 ionization/convectron gauge controller[1]
Wafer handling1
- Substrate rotation
- Direct drive, single rotation fixture with bearing-supported feedthrough and 1.0 in diameter shaft[1]
Gas & chemistry1
- Process gas control
- Two MKS 2179 mass flow controllers, each capable of 0-100 sccm in fixed flow mode[1]
Optics & imaging1
- Electron beam evaporation source
- TFI-Telemark TFI-261-06 six-pocket rotary crucible electron beam source[1]
Control & software3
- Control software interface
- GE Cimplicity software via RS-485 interface to a GE Fanuc 9030 PLC[1]
Configuration & options1
What replaced it?
Related models
- siblingDenton Vacuum Integrity-20— Listed in the same Integrity system capacity chart.source[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum chamber material304 stainless steel[1]
- Vacuum chamber dimensions29 in wide x 29 in deep x 32 in high[1]
- Vacuum chamber doorFull-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping systemAPD-10SC cryogenic pump with APD Displex water-cooled compressor and Alcatel 2063 two-stage rotary vane mechanical pump[1]
- Additional vacuum coolingPolycold PFC330ST cryogenic cooler[1]
- Vacuum gauging controllerGranville-Phillips GP307 ionization/convectron gauge controller[1]
- Process gas controlTwo MKS 2179 mass flow controllers, each capable of 0-100 sccm in fixed flow mode[1]
- Substrate heaterOne 3 kW radiant quartz heater assembly[1]
- Ion sourceDenton Vacuum CC-105 cold cathode ion source[1]
- Electron beam power supplyTFI-Telemark ST-4 4.0 kW electron beam gun power supply[1]
- Low voltage resistance source power supplyDenton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Integrity-29?
It is an ophthalmic vacuum coating system.[1]
What major subsystems are included?
The documented subsystems include the vacuum chamber system, cabinets and power/signal distribution, pumping system, vacuum gauging, process gas control, substrate fixturing/rotation, six-circuit water manifold, substrate heater system, CC-105 ion source, electron beam evaporation source, low-voltage resistance sources, source shutter, deposition control system, and control and automation.[1]
How is vacuum produced and maintained?
The system uses an APD-10SC cryogenic pump, an APD Displex water-cooled compressor, an Alcatel 2063 rotary vane mechanical pump, a Polycold PFC330ST cryogenic cooler, a high-vacuum gate valve, and automatic pumping programs.[1]
How are gases controlled?
Two MKS 2179 mass flow controllers are used. One introduces gas via the CC-104 ion source, and the other introduces gas directly into the process chamber.[1]
What does the substrate handling system accept?
The single-rotation fixture is pre-machined to accept fixturing segments and rings of various diameters that hold lenses.[1]
Not publicly documented
The following facts about the Integrity-29 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-29 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Integrity-29 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Integrity-29 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Integrity-29 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity-29 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
