Denton Vacuum
Integrity-20
Optics
16 lenses (70 mm uncut lens)[1]
Control era
Windows based
How it works
What can it run?
Process applications and technology nodes documented for this tool.
- Ophthalmic AR coating
- Lens coating
What do the numbers mean?
Optics & imaging1
Control & software1
Configuration & options10
Vintage & configurations
Control-system eraWindows based[1]
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Integrity 20 | — | — | — | web.archive.org[1] |
What replaced it?
Related models
- siblingDenton Vacuum Integrity-29— Listed in the same Integrity system capacity chart.source[1]
- siblingDenton Vacuum Integrity-36— Listed in the same Integrity system capacity chart.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Integrity-20 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-20 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented failure modes or field errata for the Integrity-20 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity-20 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Integrity-20 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Integrity-20 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]Integrity-20 — Denton Vacuum | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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The Integrity-29 is an ophthalmic coating system with a 29-inch stainless-steel vacuum chamber and integrated deposition, pumping, gauging, gas control, fixturing, heating, ion source, and automation subsystems.
