Denton Vacuum
Integrity-36
The Denton Vacuum Integrity-36 is an ophthalmic coating system. The Denton Vacuum Integrity-36 uses a 36-inch by 36-inch by 42-inch vacuum chamber made from 304 stainless steel. The Denton Vacuum Integrity-36 is controlled by a Gateway computer with GE Fanuc 9030 PLC-based Windows NT HMI software.[1]
What it is
The Denton Vacuum Integrity-36 is an ophthalmic coating system. The Denton Vacuum Integrity-36 includes a vacuum chamber system, cabinets and power and signal distribution, pumping and valve systems, vacuum gauging, pressure and flow control, substrate fixturing and rotation, a substrate heater system, a CC-105 ion source, an electron beam evaporation source, low voltage resistance sources, deposition control, and control and automation. The Denton Vacuum Integrity-36 vacuum chamber is fabricated from 304 stainless steel and measures 36 inches wide by 36 inches deep by 42 inches high.[1][3]
How it works
General reference — not yet source-verifiedOphthalmic coating systems apply thin films to lens substrates in a vacuum environment. Ophthalmic coating systems generally combine vacuum pumping, deposition sources, substrate motion, thermal management, gas control, and process automation so coatings can be formed with controlled thickness and optical behavior. Ophthalmic coating systems are used to build functional surface layers such as reflective, transmissive, protective, or surface-conditioning films on finished optical parts.
Where it fits in the process flow
General reference — not yet source-verifiedOphthalmic coating systems are positioned after lens fabrication and cleaning, when the optical substrate is ready for surface film deposition. Ophthalmic coating systems are followed by inspection, handling, and any downstream finishing needed to verify optical performance and surface condition.
Applications
General reference — not yet source-verifiedOphthalmic coating systems are used for thin-film deposition on vision-correcting and protective optical substrates. Ophthalmic coating systems support processes that tailor reflection, transmission, glare behavior, durability, and surface response through deposited film stacks.
- Ophthalmic coating
What do the numbers mean?
Power & electrical4
- Ion source
- DVI CC-105 cold cathode ion source with Senvac GD20/600 and Sorensen DCS 33-33 power supplies[1]
- Electron beam source
- TFI-Telemark TFI-261-06 six-pocket rotary crucible source with ST-4 4.0 kW power supply[1]
- Low voltage resistance source
- Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Vacuum & pumping6
- Vacuum chamber door
- Full-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping system
- APD Cryogenics Marathon 12 cryogenic pump, APD Displex water-cooled compressor, Edwards E2M175 two-stage rotary vane mechanical pump, and Polycold PFC330ST cryogenic cooler[1]
- Vacuum gauging
- Two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
Wafer handling2
- Substrate rotation
- Standard direct drive single rotation system with 1.0-inch diameter shaft[1]
Gas & chemistry1
Control & software4
- Control system
- Gateway computer with 17" SVGA monitor, IEEE-488 and RS-232 interfaces, and GE Fanuc 9030 PLC via RS-485 using GE Cimplicity HMI software[1]
- Control system
- Gateway computer with 17-inch SVGA monitor, IEEE-488 and RS-232 interfaces, and GE Fanuc 9030 PLC via RS-485 using GE Cimplicity HMI software[1]
Vintage & configurations
Control-system eraWindows NT[1]
What replaced it?
Related models
- siblingDenton Vacuum Integrity-20— Listed in the same Integrity system capacity chart.source[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum chamber material304 stainless steel[1]
- Vacuum chamber dimensions36" wide x 36" deep x 42" high[1]
- Vacuum chamber doorFull-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping systemAPD Cryogenics Marathon 12 cryogenic pump, APD Displex water-cooled compressor, Edwards E2M175 two-stage rotary vane mechanical pump, and Polycold PFC330ST cryogenic cooler[1]
- Vacuum gaugingTwo Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
- Process gas controlMKS 2179 mass flow controller, 0-100 SCCM in fixed flow mode[1]
- Substrate heatersTwo 3 kW radiant quartz heater assemblies[1]
- Ion sourceDVI CC-105 cold cathode ion source with Senvac GD20/600 and Sorensen DCS 33-33 power supplies[1]
- Electron beam sourceTFI-Telemark TFI-261-06 six-pocket rotary crucible source with ST-4 4.0 kW power supply[1]
- Low voltage resistance sourceDenton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
- Vacuum chamber dimensions36 in wide x 36 in deep x 42 in high[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Denton Vacuum Integrity-36?
The Denton Vacuum Integrity-36 is an ophthalmic coating system. The Denton Vacuum Integrity-36 includes a vacuum chamber system, pumping and valve systems, vacuum gauging, pressure and flow control, substrate fixturing and rotation, heater and ion source subsystems, evaporation sources, deposition control, and automation.[1][3]
How does the Denton Vacuum Integrity-36 measure vacuum pressure?
The Denton Vacuum Integrity-36 uses two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters for vacuum gauging. The Denton Vacuum Integrity-36 computer displays the pressure readings continuously on the control screen.[1][3]
How is process gas controlled in the Denton Vacuum Integrity-36?
The Denton Vacuum Integrity-36 maintains process gas control with one MKS 2179 mass flow controller configured for constant flow operation. The Denton Vacuum Integrity-36 controller introduces gas into the process chamber through the CC-105 ion source and is capable of controlling a 0 to 100 SCCM flowrate in fixed flow mode.[1][3]
Not publicly documented
The following facts about the Integrity-36 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-36 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Integrity-36 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the Integrity-36 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity-36 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Integrity-36 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.orgweb.archive.org
- [3]Integrity-36 — Denton Vacuum | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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