Denton Vacuum
Integrity-36
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Ophthalmic coating
What do the numbers mean?
Power & electrical4
- Ion source
- DVI CC-105 cold cathode ion source with Senvac GD20/600 and Sorensen DCS 33-33 power supplies[1]
- Electron beam source
- TFI-Telemark TFI-261-06 six-pocket rotary crucible source with ST-4 4.0 kW power supply[1]
- Low voltage resistance source
- Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Vacuum & pumping5
- Vacuum chamber door
- Full-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping system
- APD Cryogenics Marathon 12 cryogenic pump, APD Displex water-cooled compressor, Edwards E2M175 two-stage rotary vane mechanical pump, and Polycold PFC330ST cryogenic cooler[1]
- Vacuum gauging
- Two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
Wafer handling1
Gas & chemistry1
Control & software3
- Control system
- Gateway computer with 17" SVGA monitor, IEEE-488 and RS-232 interfaces, and GE Fanuc 9030 PLC via RS-485 using GE Cimplicity HMI software[1]
Vintage & configurations
Control-system eraWindows NT[1]
What replaced it?
Related models
- siblingDenton Vacuum Integrity-20— Listed in the same Integrity system capacity chart.source[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum chamber material304 stainless steel[1]
- Vacuum chamber dimensions36" wide x 36" deep x 42" high[1]
- Vacuum chamber doorFull-width front door with two-point articulating hinges and Viton O-ring seal[1]
- Pumping systemAPD Cryogenics Marathon 12 cryogenic pump, APD Displex water-cooled compressor, Edwards E2M175 two-stage rotary vane mechanical pump, and Polycold PFC330ST cryogenic cooler[1]
- Vacuum gaugingTwo Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[1]
- Process gas controlMKS 2179 mass flow controller, 0-100 SCCM in fixed flow mode[1]
- Substrate heatersTwo 3 kW radiant quartz heater assemblies[1]
- Ion sourceDVI CC-105 cold cathode ion source with Senvac GD20/600 and Sorensen DCS 33-33 power supplies[1]
- Electron beam sourceTFI-Telemark TFI-261-06 six-pocket rotary crucible source with ST-4 4.0 kW power supply[1]
- Low voltage resistance sourceDenton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Integrity-36?
It is an ophthalmic coating system with vacuum chamber, pumping, gauging, pressure/flow control, deposition sources, and automation subsystems.[1]
What vacuum pumping components are included?
The pumping system includes an APD Cryogenics Marathon 12 cryogenic pump, an APD Displex water-cooled compressor, an Edwards E2M175 two-stage rotary vane mechanical pump, and a Polycold PFC330ST cryogenic cooler.[1]
How is vacuum pressure measured?
Vacuum gauging is accomplished with two Leybold Inficon ITR100 ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters. The system computer displays the readings numerically and includes automatic gauge control and interlocks.[1]
How is process gas controlled?
Process gas control is maintained by one MKS 2179 mass flow controller configured for constant flow operation and capable of controlling a 0-100 SCCM flowrate in fixed-flow mode.[1]
Not publicly documented
The following facts about the Integrity-36 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Integrity-36 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Integrity-36 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the Integrity-36 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Integrity-36 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Integrity-36 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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