Disco
DAD 3220 Automatic Dicing
The Disco DAD 3220 is an automatic dicing saw for semiconductor wafer dicing. The Disco DAD 3220 features a spindle with power ratings of 1.5 kW and 1000 W and a maximum spindle speed of 40,000 min−1. The Disco DAD 3220 supports 6-inch wafers.[1][2][3][4]
What it is
General reference — not yet source-verifiedA dicing saw is a singulation tool used in semiconductor and related microfabrication lines. Dicing saws cut processed wafers or substrates into individual dies along predefined streets after most front-end and back-end device fabrication is complete.
How it works
General reference — not yet source-verifiedAutomatic dicing saws generally hold a taped wafer or substrate on a chuck, align the cut pattern with an optical system, and move a rotating blade through programmed streets. The machine typically combines spindle motion, stage motion, alignment optics, and process monitoring to execute repeated cuts across the workpiece.
Where it fits in the process flow
General reference — not yet source-verifiedDicing takes place late in device manufacturing after wafer fabrication and after any needed thinning, backside preparation, or protective mounting for singulation. The dicing step prepares individual chips or device pieces for downstream handling such as die attach, packaging, or further assembly.
Applications
General reference — not yet source-verifiedAutomatic dicing saws are used where a wafer or similar substrate must be separated into individual units with controlled kerf placement. Typical application areas include semiconductor devices, compound semiconductor parts, sensors, optoelectronic devices, and other small substrates laid out in arrays.
What do the numbers mean?
Power & electrical7
- 1000 Watt Spindle[2]
Wafer handling5
- Chuck Table[2]
- Included components (example configuration)
- Chuck Table, Manuals (flash drive), Blade Removal Tools, Floppy Drive, Monitor, BBD, NCS, Flow Sensors, Alarm Lights[2]
- Accessories / included items
- Chuck table, manuals (flash drive), blade removal tools, major preventive maintenance performed, floppy drive, monitor, BBD, NCS, flow sensors, alarm lights[2]
Optics & imaging1
Control & software1
- Control board issue on the X and Theta axis controller where they sometimes move at the same time[7]
Configuration & options22
- Manuals (flash drive)[2]
- Blade Removal Tools[2]
- Major Preventive Maintenance Performed[2]
- Floppy Drive[2]
- Monitor[2]
- BBD[2]
- NCS[2]
- Flow Sensors[2]
- Alarm Lights[2]
- Spindle revolutions 40,000 min[3]
- Has an external transformer[3]
- Heavy duty spindle[7]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- ADT 7500 Dicing— Same function class: Dicing & Grinding, UnknownCompare in depthsource[8]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the DAD 3220 Automatic Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DAD 3220 Automatic Dicing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DAD 3220 Automatic Dicing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DAD 3220 Automatic Dicing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DAD 3220 Automatic Dicing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DAD 3220 Automatic Dicing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (11)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
- [5]Inventory photo
- [6]Inventory photo
- [7]inventory listing
- [8]Equipment inventory listing
- [9]Equipment inventory listing
- [10]Equipment Capabilities - Electrical & Computer Engineering — ece.utoronto.caece.utoronto.ca
- [11]DAD3220 | 切割機 | 產品介紹 | DISCO CORPORATION — disco.co.jp (May 15, 2026)web.archive.org
Last updated Oct 20, 2026.
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