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Disco

DFL 7340 Laser Dicing

Dicing & GrindingDisco DFL 7340 family
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DFL 7340 Laser Dicing — Inventory photo
Fig. 01DFL 7340 Laser DicingInventory photo[1]

Power

3 phase[1]

Performance

3µm[4]

Optics

laser dicing saw[1]

How it works

The Disco DFL7340 performs laser stealth dicing of silicon wafers in a fully automated mode. The Disco DFL7340 uses an IR process wavelength. The Disco DFL7340 has an IR camera for back side alignment. The Disco DFL7340 has X-axis and Y-axis feeding speed of 1.0 to 1000 mm/s. The Disco DFL7340 has position accuracy of 3 µm.[4]

Applications

The Disco DFL7340 is used for contact-less dicing of silicon wafers. The Disco DFL7340 is applied in PICs, MEMS, BIO-MEMS, and semiconductor non-wet dicing. The Disco DFL7340 handles 200 mm wafers or smaller, including 6 inch, 4 inch, 3 inch, coupon, and wafer quarter formats. The Disco DFL7340 supports wafers up to 1.5 mm thick. The Disco DFL7340 has multi-project wafers dicing capabilities.[4]

What do the numbers mean?

Power & electrical2

Phase
3 phase[1]
Accurate?
Power
3 phase[1]
Accurate?

Wafer handling4

Wafer sizes
6 inch[2]
Accurate?
Wafer diameter
200mm wafers or smaller (6in, 4in, 3in, coupon, wafer quarter)[4]
Accurate?
Maximum wafer thickness
up to 1.5 mm[4]
Accurate?
Multi-project wafers
MPW dicing capabilities[4]
Accurate?

Optics & imaging3

Tool type
laser dicing saw[1]
Accurate?
Process wavelength
IR[4]
Accurate?
Back side alignment
IR camera[4]
Accurate?

Performance1

Position accuracy
3µm[4]
Accurate?

Configuration & options1

Feeding speed
1.0 – 1000 mm/s[4]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 phase[1]
  • Power3 phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What material does the Disco DFL7340 dice?

The Disco DFL7340 is used for laser stealth dicing of silicon wafers.[4]

Not publicly documented

The following facts about the DFL 7340 Laser Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL 7340 Laser Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFL 7340 Laser Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFL 7340 Laser Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFL 7340 Laser Dicing are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFL 7340 Laser Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]c2mi.ca — c2mi.cac2mi.ca
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Last updated Oct 20, 2026.

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