Disco
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The Disco DFL7340 performs laser stealth dicing of silicon wafers in a fully automated mode. The Disco DFL7340 uses an IR process wavelength. The Disco DFL7340 has an IR camera for back side alignment. The Disco DFL7340 has X-axis and Y-axis feeding speed of 1.0 to 1000 mm/s. The Disco DFL7340 has position accuracy of 3 µm.[4]
The Disco DFL7340 is used for contact-less dicing of silicon wafers. The Disco DFL7340 is applied in PICs, MEMS, BIO-MEMS, and semiconductor non-wet dicing. The Disco DFL7340 handles 200 mm wafers or smaller, including 6 inch, 4 inch, 3 inch, coupon, and wafer quarter formats. The Disco DFL7340 supports wafers up to 1.5 mm thick. The Disco DFL7340 has multi-project wafers dicing capabilities.[4]
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The Disco DFL7340 is used for laser stealth dicing of silicon wafers.[4]
The following facts about the DFL 7340 Laser Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL 7340 Laser Dicing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DFL 7340 Laser Dicing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DFL 7340 Laser Dicing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DFL 7340 Laser Dicing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DFL 7340 Laser Dicing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 20, 2026.
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