Disco
F DFP 8160 Fully Automated
The Disco F DFP 8160 Fully Automated is a fully automated polisher. The Disco F DFP 8160 Fully Automated is specified for 8-inch to 12-inch wafers. The Disco F DFP 8160 Fully Automated has a spindle max. revolution of 3000min.[1][2]
How it works
The Disco F DFP 8160 Fully Automated has a maximum spindle revolution of 3000 min. The Disco F DFP 8160 Fully Automated requires air at 0.5 MPa with 550 L/min (ANR). The Disco F DFP 8160 Fully Automated also specifies cutting water at 0.3 MPa and 20 L/min, plus cooling water at 0.2 MPa and 4 L/min.[2][1]
What do the numbers mean?
Power & electrical3
Wafer handling1
Dimensions & facilities1
Configuration & options8
- 550L/min(ANR)[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What electrical service does the Disco F DFP 8160 Fully Automated require?
The Disco F DFP 8160 Fully Automated requires 200 VAC three-phase power at 50/60 Hz. The Disco F DFP 8160 Fully Automated has a full-load current of 57 A.[2][1]
What is the maximum spindle speed of the Disco F DFP 8160 Fully Automated?
The Disco F DFP 8160 Fully Automated has a maximum spindle revolution of 3000 min.[2][1]
Not publicly documented
The following facts about the F DFP 8160 Fully Automated are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F DFP 8160 Fully Automated are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F DFP 8160 Fully Automated are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F DFP 8160 Fully Automated are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F DFP 8160 Fully Automated are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F DFP 8160 Fully Automated is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]F DFP 8160 Fully Automated — Disco | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 15, 2026.
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