Edwards
EB1
The Edwards EB1 is a magnetically focused electron beam source. The Edwards EB1 is ultra-compact. The Edwards EB1 is powered by an EB3 5 kV 600 mA constant voltage power supply.[1][2]
What it is
The Edwards EB1 is a magnetically focused electron beam source for thin film deposition. The Edwards EB1 is ultra-compact and is supplied mounted on an integral dual water feedthrough. The Edwards EB1 uses a 1 cm3 copper hearth. The Edwards EB1 can be fitted in multiple-source arrangements for multi-layer depositions.[1]
How it works
The Edwards EB1 has a standard hearth formed as a water-cooled copper block with a conically shaped aperture that accepts a removable copper crucible. The Edwards EB1 can also take refractory crucible liners for evaporating materials such as aluminum and copper. The Edwards EB1 has a variable power rating up to 3.0 kVA. The Edwards EB1 achieves 180 beam deflection by a permanent magnet made from Trigonal G. The Edwards EB1 is powered by the EB3 5 kV 600 mA constant voltage power supply. The Edwards EB1 is supplied complete with two high vacuum feedthroughs.[1]
Where it fits in the process flow
General reference — not yet source-verifiedElectron beam evaporation tools sit in the thin film formation portion of a process flow. Electron beam sources are used after substrate preparation and before later steps that may include pattern transfer, lift-off, annealing, inspection, or additional film deposition. In research and specialty production environments, electron beam deposition is commonly integrated where a vacuum-deposited metal or compound layer is needed on a prepared substrate.
Applications
The Edwards EB1 is intended for high rate, thick film depositions. The Edwards EB1 can be used in multiple-source arrangements for multi-layer depositions. The Edwards EB1 can use refractory crucible liners for evaporating aluminum and copper.[1]
- thin film deposition
- high rate, thick film depositions
- multi-layer depositions
- evaporating aluminum and copper
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Optics & imaging1
Configuration & options11
- standard hearth
- water-cooled copper block with a conically shaped aperture to accept a removable copper crucible[1]
- crucible liners
- refractory crucible liners can be fitted for evaporating aluminum and copper[1]
- magnet characteristics
- selected for low outgassing characteristics and field stability at high temperatures[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Edwards EB1?
The Edwards EB1 is a magnetically focused electron beam source for thin film deposition.[1]
What hearth does the Edwards EB1 use?
The Edwards EB1 uses a 1 cm3 copper hearth.[1]
What power supply is used with the Edwards EB1?
The Edwards EB1 is powered by the EB3 5 kV 600 mA constant voltage power supply.[1]
Can the Edwards EB1 support multilayer deposition setups?
The Edwards EB1 can be fitted in multiple-source arrangements for multi-layer depositions.[1]
Not publicly documented
The following facts about the EB1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EB1 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EB1 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EB1 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EB1 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EB1 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]EB1 — Edwards | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 15, 2026.
