2"

The KLA Tencor D600 is a stylus surface profiler for thin and thick film step height measurement.

The Agilent E8364B is a PNA network analyzer. The Agilent E8364B is a microwave network analyzer with a 10 MHz to 50 GHz frequency range.

The EVG 101 Spray Coater is a semi-automatic wafer spray coating system configured for 2-inch to 4-inch wafers.

The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.

The Plasma-Therm SLR-770 ICP is a chlorine etcher configured as an inductively coupled plasma etch system with vacuum load lock and wafer transfer robot.