EV Group
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The EVG IQA 0048 is a mask aligner manufactured by EV Group.[1]
The tool typically includes a top-side microscope for viewing alignment marks, a substrate chuck, and a mask holder. Exposure dose and alignment accuracy are controlled to meet process requirements.
The tool supports a variety of substrate sizes and materials, including silicon, glass, and compound semiconductors.
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The following facts about the IQA 0048 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IQA 0048 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IQA 0048 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IQA 0048 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IQA 0048 Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IQA 0048 Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Last updated Oct 4, 2026.
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