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Filmetrics

F37

In-line thickness measurement systemFilmetrics F37 family
Research Quality: 40% complete
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F37 — web.archive.org
Fig. 01F37web.archive.org[1]

Performance

Better than ±1%[1]

Control era

Windows

What is it?

The Filmetrics F37 is described as an in-line thickness measurement system that measures film thickness in-line and in real time at up to seven locations. The source states it can measure almost any smooth and at-least-partially transparent films, including virtually any semiconducting material, and notes that it is non-invasive and uses Windows software.

What can it run?

Process applications and technology nodes documented for this tool.

  • Semiconductors
  • Thin-film photovoltaics

What do the numbers mean?

Performance1

Accuracy
Better than ±1%[1]
Accurate?

Control & software2

Software
Intuitive Windows software[1]
Accurate?
Common optional accessory
Laptop computer pre-loaded with FILMeasure software[1]
Accurate?

Configuration & options7

Measurement mode
In-line and in real time[1]
Accurate?
Measurement locations
Up to seven locations[1]
Accurate?
Measurable films
Almost any smooth and at-least-partially transparent films[1]
Accurate?
Semiconductor material coverage
Virtually any semiconducting material, including those used in thin-film photovoltaics[1]
Accurate?
Measurement speed
Seconds[1]
Accurate?
Installation location
Totally outside of deposition chamber[1]
Accurate?
Setup time
Minutes[1]
Accurate?

Vintage & configurations

Control-system eraWindows[1]

Interested in this tool?
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What replaced it?

  • siblingFilmetrics F20— Listed on the same products overview navigation as related Filmetrics models.source[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F37 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F37 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F37 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • No publicly documented failure modes or field errata for the F37 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F37 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the F37 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.