Waferpedia

Filmetrics

F80

Legacythin-film thickness measurement systemIntroduced Filmetrics F80 family
Research Quality: 40% complete
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F80 — web.archive.org
Fig. 01F80web.archive.org[1]

Introduced

2001

Performance

industry-leading throughput[1]

What is it?

The Filmetrics F80 is described as an in-line thin-film thickness mapping system using Thickness Imaging technology for product wafers. Sources state that it maps thickness on patterned wafers, can be used for CVD and CMP patterned wafers, and is available in configurations ranging from manual tabletop systems to fully automated cassette-to-cassette systems.

What can it run?

Process applications and technology nodes documented for this tool.

  • product wafers
  • patterned wafers
  • ILD thickness measurement
  • wafer thickness mapping
  • process control for semiconductor manufacturing

What do the numbers mean?

Wafer handling4

target wafers
patterned wafers[1]
Accurate?
in-line capability
maps ILD thickness on product wafers during normal wafer transfer[3]
Accurate?
measurement coverage
maps 100% of a wafer's surface in under 3 seconds[3]
Accurate?
measurement path
measurements are taken through the transfer chamber viewport[3]
Accurate?

Performance1

throughput claim
industry-leading throughput[1]
Accurate?

Configuration & options4

measurement type
thin-film thickness mapping system[1]
Accurate?
technology
Thickness Imaging[1]
Accurate?
measurement speed
as fast as 15 points in 21 seconds[1]
Accurate?
integration
does not require a dedicated metrology chamber and can be integrated onto existing equipment[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
F80-T———web.archive.org[1]
F80-C———instrumenthive.com[4]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the F80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F80 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the F80 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F80 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F80 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the F80 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
  4. [4]instrumenthive.com — instrumenthive.cominstrumenthive.com
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Last updated Jul 29, 2026.