Waferpedia

Lifecycle

Legacy

23 entries

  1. TP-80Seiko Epson

    The Epson TP-80 (also known as the TX-80) is an 80-column dot matrix printer released in June 1978.

    Category80-column dot matrix printer
    Legacy
  2. PAS 5500ASML

    The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.

    CategoryLithographyWafer200mmNode280 nm
    Legacy
  3. JEM-1JEOL

    JEOL's JEM-1 was the company's first commercial model transmission electron microscope.

    CategoryMetrology & Inspection
    Legacy
  4. 900ACSTegal

    The Tegal 900ACS is a single-wafer cassette-to-cassette non-critical plasma etch system for 75mm to 200mm wafers.

    CategoryEtchWafer75mm to 200mm wafers
    Legacy
  5. 981Tegal

    The Tegal 981 is a plasma etch tool for thin film head fabrication, described as achieving precise photoresist descum with 4:1 anisotropy at low processing temperatures in oxygen-free plasmas.

    CategoryEtchWafer150mm
    Legacy
  6. TAGA 6000SCIEX

    The SCIEX TAGA 6000 was introduced in 1981 as the first commercial triple quadrupole mass spectrometer.

    CategoryPrecision Optics
    Legacy
  7. 564Tektronix

    The Tektronix 564 was introduced in 1964 as the world's first mass-produced analog storage oscilloscope.

    Categoryoscilloscope
    Legacy
  8. TX-80Seiko Epson

    The Epson TX-80 was an eighty-column dot matrix printer released in June 1978 and mainly used as a system printer for the Commodore PET computer.

    Categorydot matrix printer
    Legacy
  9. MP36PH-3SMPI

    The MPI MP36PH-3S is a diesel-electric passenger locomotive built by MotivePower, using an EMD 16-645F3B prime mover and rated at 3,600 hp.

    Categorydiesel-electric passenger locomotive
    Legacy
  10. F80Filmetrics

    Filmetrics F80 is a thin-film thickness mapping system for product wafers that measures patterned wafers and generates thickness images.

    Categorythin-film thickness measurement system
    Legacy
  11. 1119View Engineering

    VIEW 1119 was introduced in 1982 as a combination of the VIEW 719 and VIEW 1101, providing pattern recognition and edge detection capabilities.

    Categorymachine vision system
    Legacy
  12. 3210Perkin Elmer

    Perkin-Elmer 3210 is a minicomputer model that was available by 1982.

    Legacy
  13. 1350 OMSAlcatel

    The Alcatel-Lucent 1350 OMS is a unified optical management system that centralizes network management functions for the entire Alcatel-Lucent Optics portfolio.

    Categoryterrestrial network management system
    Legacy
  14. 1220View Engineering

    VIEW 1220 is a 2nd generation grayscale image machine vision-based coordinate-measuring machine introduced in 1985.

    Categorymachine vision-based CMM
    Legacy
  15. RB-1View Engineering

    The View Engineering RB-1 was introduced in 1977 as an automated, 3-axis, binary image, machine vision-based dimensional measurement system.

    Categorymachine vision-based dimensional measurement system
    Legacy
  16. MP-80Seiko Epson

    The Epson MP-80 was an improved model of the MX-80 dot matrix printer, launched in October 1980.

    Categorydot matrix printer
    Legacy
  17. PAS 2000ASML
    CategoryLithography
    Legacy
  18. P-20HKLA

    The KLA P-20H is a stylus profilometer used for measuring surface topography, thin-film thickness, wafer bow, and surface roughness.

    CategoryMetrology & Inspection
    Legacy
  19. PWM32Headway

    The Headway PWM32 is a spinner spin controller that was later upgraded to the PWM50.

    Categoryspin controller
    Legacy
  20. Precision 5000Applied Materials

    Applied Materials introduced the Precision 5000 in 1987 as a chemical vapor deposition machine.

    CategoryDeposition
    Legacy
  21. JEM-7JEOL

    The JEOL JEM-7 is an electron microscope introduced in 1964 and described as the first electron microscope to include a mechanism for electrical adjustment of the lens axis.

    CategoryMetrology & Inspection
    Legacy
  22. R1YES
    CategoryWet Processing / Clean
    Legacy
  23. 1101View Engineering

    The VIEW 1101 was a second-generation binary image pattern recognition system introduced in 1982 for automated wirebonding machines and wafer probers.

    CategoryPackaging & Bonding
    Legacy