KLA
TP 500 Implant Dose Measurement
The KLA / Therma-wave TP 500 is an implant dose measurement tool used in ion implantation. The TP 500 operates on single phase power at 120 V, 50/60 Hz, with a circuit breaker of 20 and full current load of 7.5.[1][2]
What it is
What do the numbers mean?
Power & electrical6
Wafer handling1
Optics & imaging2
- Camera Only[8]
Configuration & options8
- Refurbished[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the TP 500 Implant Dose Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TP 500 Implant Dose Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TP 500 Implant Dose Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TP 500 Implant Dose Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TP 500 Implant Dose Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TP 500 Implant Dose Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]inventory listing
- [9]fabsurplus.com — fabsurplus.comfabsurplus.com
- [10]KLA TP 500 Implant Dose Measurement family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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