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Kurt Lesker

Nano36

Kurt LeskerNano36
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What is it?

The Kurt J Lesker Nano36 Thermal Deposition System is listed in the Cleanroom Nanofabrication Facility instrumentation inventory and classified as cleanroom instrumentation for thin film fabrication. The facility page places it at FNT 4.106.

What can it run?

Process applications and technology nodes documented for this tool.

  • Thin film fabrication

What do the numbers mean?

Configuration & options5

OEM
Kurt J Lesker[1]
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Model
Nano36 Thermal Deposition System[1]
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Equipment type
Cleanroom Instrumentation[1]
Accurate?
Process category
Thin Film Fabrication[1]
Accurate?
Location
FNT 4.106[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Nano36 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Nano36 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Nano36 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Nano36 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Nano36 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Nano36 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edutmi.utexas.edu
  2. [2]Instrumentationtmi.utexas.edutmi.utexas.edu
  3. [3]Cleanroom Nanofabrication Facilitytmi.utexas.edutmi.utexas.edu
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Last updated Jul 29, 2026.

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