Lam Research

Concept Two Triple Speed

Deposition Entegris FA 200-85 MT 7902 Wafer Cassette Lam Research Concept Two Triple Speed family

Research Quality: 30% complete

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Concept Two Triple Speed — Inventory photo — Fig. 01Concept Two Triple SpeedInventory photo^[1]

Wafer size

Entegris FA 200-85 MT 7902 Wafer Cassette

Vacuum

MKS^[1]

What is it?

Lam / Novellus Concept Two Triple Speed is a PECVD system for 8-inch wafers.

What do the numbers mean?

Vacuum & pumping1

Pressure Control: MKS^[1]

Wafer handling3

Wafer Substrate: Silicon^[1]
Wafer size: Entegris FA 200-85 MT 7902 Wafer Cassette^[1]
Wafer size: Active Wafer Centering^[1]

Control & software2

Software: Speed Next 5.502 B22^[1]
User Interface Options: Cleanroom (Right Side)^[1]

Dimensions & facilities1

Facilities Kit: Bottom^[1]

Configuration & options11

Cable length: 75 ft^[1]; DLCM^[1]
Front End Option: SMIF Ready^[1]
Paddle & Arc Kits: STD^[1]
Cool Station Options: MPS (Multi PEC Station)^[1]
Particle Check Options: Particle Sensor Manifold^[1]
Manometers: Heated^[1]
Light Towers: 3 Lights - RYG^[1]
Light Towering Mounting: Staff Mount^[1]
TM Cover Options: STD Cover^[1]
MPD: Triple^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Pressure ControlMKS^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Concept Two Triple Speed are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept Two Triple Speed are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Concept Two Triple Speed are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Concept Two Triple Speed are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Concept Two Triple Speed are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Concept Two Triple Speed is not on record.
Answerable by: an OEM datasheet or a fab qualification report