Leybold

CCS pro AR

Deposition Leybold CCS pro AR family

Research Quality: 30% complete

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CCS pro AR — Inventory photo — Fig. 01CCS pro ARInventory photo^[1]

Power

3 Phase^[1]

Vacuum

Leybold D65B Mechanical pump^[1]

What is it?

Leybold CCS pro AR is a coater described with 3-phase, 400 V AC, 50 Hz, 20 KVA power requirements and a listed set of included components.

What do the numbers mean?

Power & electrical3

Phase: 3 Phase^[1]
Voltage: 400 V AC^[1]
Frequency: 50 Hz^[1]

Vacuum & pumping2

Leybold D65B Mechanical pump^[1]

Accurate?

Turbomolecular High vacuum pump^[1]

Accurate?

Configuration & options11

Power: 20 KVA^[1]; 1x HPE6 Egun with 7 pockets^[1]; 1x MkI ion source^[1]; Dome tooling^[1]; Polycold^[1]; 2 domes^[1]; 2 sets of drop rings^[1]; 1 dome holder for loading^[1]; Spare set of shields^[1]; Hard copies of manuals and documentation^[1]; Fully refurbished^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Voltage400 V AC^[1]
Frequency50 Hz^[1]
ConfigurationLeybold D65B Mechanical pump^[1]
ConfigurationTurbomolecular High vacuum pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the CCS pro AR are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CCS pro AR are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CCS pro AR are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CCS pro AR are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CCS pro AR are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CCS pro AR is not on record.
Answerable by: an OEM datasheet or a fab qualification report