Eclipse E 600

Microscopes in metrology and inspection are used for direct visual examination of wafers, masks, packaged devices, and process test structures. Optical microscopes of this class support operator review of surface condition, pattern quality, alignment features, contamination, and defect morphology.

Optical microscopes form a magnified image of a sample through an objective and eyepiece or camera path. Polarizing microscopes add polarization optics so the observer can enhance contrast from anisotropic materials, stress features, grain structure, or orientation-dependent optical effects.

Inspection microscopes are typically used by placing the sample on a stage, focusing through the optical train, and selecting illumination and contrast conditions suited to the surface or film under review. A camera-equipped configuration can support image capture and shared review.

Optical inspection microscopes are used throughout semiconductor and microfabrication work wherever rapid human review is needed between process steps. Microscopes of this class commonly appear after lithography, etch, deposition, polish, cleave, assembly, and failure-analysis preparation steps.

Microscopes of this class are used for defect review, workmanship checks, sample documentation, and general laboratory inspection. Polarizing capability is useful for materials and structures whose appearance changes with polarization, including certain crystals, films, minerals, and stress-sensitive features.