Nikon
NSR 2005 i 9 i-Line
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Nikon NSR 2005 i 9 is an i-line stepper used for lithography.[1]
What it is
How it works
General reference — not yet source-verifiedi-line lithography uses a specific ultraviolet emission of a mercury arc lamp. The photoresist is selectively changed by the exposure, forming a latent image that is developed after exposure.
Steppers of this class typically include an alignment system that overlays each exposure field with previously patterned layers on the wafer.
Where it fits in the process flow
General reference — not yet source-verifiedLithography is the patterning step in the front end of semiconductor fabrication. Before exposure, a wafer is coated with photoresist; after exposure, the wafer is developed, etched, and stripped of residual resist.
What do the numbers mean?
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the NSR 2005 i 9 i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 9 i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 9 i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2005 i 9 i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2005 i 9 i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2005 i 9 i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Aug 14, 2026.
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