Nikon
NSR S 207 D
What it is
General reference — not yet source-verifiedA stepper is a projection lithography tool used in semiconductor fabrication. A stepper transfers a patterned image from a reticle onto photoresist on a wafer by exposing one field at a time and moving the wafer stage between exposures.
How it works
General reference — not yet source-verifiedPhotolithography steppers illuminate a reticle with pulsed light from an exposure source and project the reticle image through reduction optics onto resist-coated wafers. The tool aligns each exposure field to wafer marks, exposes the field, and then steps the wafer stage to the next location for repeated imaging across the wafer.
Where it fits in the process flow
General reference — not yet source-verifiedA lithography stepper sits in the patterning portion of wafer fabrication. A lithography stepper is used after wafer surface preparation and photoresist coating, and before post-exposure bake, development, pattern inspection, and pattern transfer by etch or implant-related module steps.
Applications
General reference — not yet source-verifiedLithography steppers are used to print patterned layers for integrated-circuit manufacturing and related microfabrication. A lithography stepper can be used wherever repeated, aligned transfer of reticle patterns onto photoresist is required across successive process layers.
What do the numbers mean?
Optics & imaging9
Configuration & options8
- Machine only[4]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSR S 207 D with Cymer laser | — | 2005 | Listed as a Nikon NSR S 207 D stepper with Cymer laser. | Equipment inventory listing[1] |
| NSR S 207 D with Gigaphoton laser | — | 2005 | Listed as a Nikon NSR S 207 D stepper with Gigaphoton laser. | Equipment inventory listing[2] |
| NSR S 207 D with G41K2 Gigaphoton laser | — | 2004 | Listed as a Nikon NSR S 207 D stepper with G41K2 Gigaphoton laser. | Equipment inventory listing[3] |
| NSR S 207 D machine only | — | — | Listed as the Nikon NSR S 207 D stepper machine only. | Equipment inventory listing[4] |
| Nikon NSR S 207 D with Cymer laser | — | 2005–2005 | Configured with a Cymer laser. | Equipment inventory listing[1] |
| Nikon NSR S 207 D with Gigaphoton laser | — | 2005–2005 | Configured with a Gigaphoton laser. | Equipment inventory listing[2] |
| Nikon NSR S 207 D with Gigaphoton laser (second unit) | — | 2005–2005 | Configured with a Gigaphoton laser. | Equipment inventory listing[5] |
| Nikon NSR S 207 D with G41K2 Gigaphoton laser | — | 2004–2004 | Configured with a G41K2 Gigaphoton laser. | Equipment inventory listing[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NSR S 207 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 207 D are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSR S 207 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR S 207 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR S 207 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR S 207 D are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]inventory listing
- [5]Equipment inventory listing
Last updated Oct 15, 2026.
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