Waferpedia

Nikon

NSR S 307 E

NSR S 307 E — Inventory photo
Fig. 01NSR S 307 EInventory photo[1]

Wafer size

Wafer X-Axis is out of order

Optics

ArF excimer laser[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Wafer X-Axis is out of order

What do the numbers mean?

Wafer handling2

Wafer
300 mm[1]
Accurate?
Wafer size
Wafer X-Axis is out of order[1]
Accurate?

Optics & imaging6

Exposure Light Source
ArF excimer laser[1]
Accurate?
Wavelength
193[1]
Accurate?
Resolution
80 nm[1]
Accurate?
Alignment Accuracy
12 nm[1]
Accurate?
Exposure Field
26 x 33 mm[1]
Accurate?
Lens Data[2]
Accurate?

Configuration & options3

Reduction Ratio
1:4[1]
Accurate?
Hard Disk, 300mm[2]
Accurate?
Cymer XLA 140[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the NSR S 307 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 307 E are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR S 307 E are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR S 307 E are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the NSR S 307 E is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NSR S 307 E are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Nikon Precision Incnikonprecision.com (May 15, 2006)web.archive.org
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Last updated Jul 29, 2026.

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