Optistation 7 Optical Review

As a class, an optical review system is used to inspect patterned surfaces with optical imaging so operators can examine defects, verify process results, and support decision-making in manufacturing control. It is part of the inspection and metrology side of a fab rather than a primary process tool.

Optical review tools generally form an image of the wafer surface under controlled illumination and magnification, allowing defects, particles, pattern irregularities, and other surface features to be examined visually or with assisted analysis. The review function is typically used after automated detection or process steps to help classify and understand what was found.

In a semiconductor inspection flow, an optical review system usually relies on a stage to position the wafer and optics to capture surface detail at selected locations. The operator or inspection workflow then uses those images to decide whether an observed feature is a true defect, a process artifact, or a benign condition.

An optical review system sits downstream of wafer fabrication steps where surface defects or process anomalies may need closer examination. It supports the inspection loop by helping confirm findings from broader defect screening and by providing visual context for yield or process troubleshooting.

The class is used in metrology and inspection areas of the fab, alongside tools that evaluate pattern integrity and surface quality before wafers move on to further processing, test, or disposition decisions.

Optical review systems are used for defect review, particle inspection, pattern verification, and general surface-quality examination on semiconductor wafers. They are applied where visual confirmation of surface features is needed to support process control and yield analysis.