Waferpedia

Nikon

SF 200

LithographyNikon SF 200 family
Research Quality: 20% complete
SF 200 — Inventory photo
Fig. 01SF 200Inventory photo[1]
  • Plate 01Nikon Scanner Super Coolscan 4000 ED w Slide Feeder SF-200(S)

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Performance

LSA, FIA[1]

Optics

Komatsu[1]

What is it?

What do the numbers mean?

Wafer handling1

Wafer loader type
type 3, NC Pre2[1]
Accurate?

Optics & imaging4

Laser
Komatsu[1]
Accurate?
Resolution
0.18um[1]
Accurate?
Reticle size
6"[1]
Accurate?
Reticle library
Nikon standard (9 slot)[1]
Accurate?

Performance1

Alignment system
LSA, FIA[1]
Accurate?

Configuration & options5

Max expose field size
26mm x 33mm[1]
Accurate?
PPD[1]
Accurate?
Bar code reader[1]
Accurate?
Inline
Left in'line[1]
Accurate?
Chamber type
S61[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the SF 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SF 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SF 200 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SF 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SF 200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SF 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Nikon Precision Incnikonprecision.com (May 15, 2006)web.archive.org
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Last updated Jul 29, 2026.

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