Perkin Elmer

4400

Deposition Perkin Elmer 44xx family

Research Quality: 20% complete

LinkedIn X Email

4400 — Inventory photo — Fig. 014400Inventory photo^[1]

Power

Power Supply^[1]

Vacuum

Pump Exhaust GEEX^[1]

What is it?

What do the numbers mean?

Power & electrical4

Power Supply^[1]
Power: 208 V, 3 Phase, 60 A^[1]; The system is DC and RF, with DC-RF bias capable.^[2]; It does have the RF etch option.^[2]

Vacuum & pumping9

Pump Exhaust GEEX^[1]; Backing Pump^[1]; Cryo Compressor^[1]; Mechanical Pump^[1]
CDA: 60-80 psi^[1]
N2: 50 psi^[1]
HPN2: 60 psi^[1]
HPAr: 10 psi^[1]
O2: 10 psi^[1]

Wafer handling2

Handler Type: Manual^[1]; Load Lock^[2]

Configuration & options9

GEM / SECS^[1]; AC Dist Box^[1]; Heat Exchange / Chiller^[1]
Chilled Water: 68 F, 2 gpm^[1]; All cables present^[1]; STD Manual included^[1]; No CE Mark^[1]; No Field Modifications^[1]; The system is set up for planar targets with planar magnet setups.^[2]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationPump Exhaust GEEX^[1]
ConfigurationPower Supply^[1]
ConfigurationBacking Pump^[1]
ConfigurationCryo Compressor^[1]
ConfigurationMechanical Pump^[1]
CDA60-80 psi^[1]
N250 psi^[1]
HPN260 psi^[1]
HPAr10 psi^[1]
O210 psi^[1]
Power208 V, 3 Phase, 60 A^[1]
ConfigurationThe system is DC and RF, with DC-RF bias capable.^[2]
ConfigurationIt does have the RF etch option.^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 4400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4400 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4400 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4400 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4400 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4400 is not on record.
Answerable by: an OEM datasheet or a fab qualification report