Rehm

RDS 6000

Thermal / Diffusion Rehm RDS 6000 family

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RDS 6000 — Inventory photo — Fig. 01RDS 6000Inventory photo^[1]

What it is

The Rehm RDS 6000 is a UV curing oven used in industrial manufacturing.^[1]^[2]^[3]^[4]^[5]

How it works

General reference — not yet source-verified

Diffusion furnaces such as the RDS 6000 expose wafers to controlled high-temperature environments to introduce dopants into the semiconductor material.

Where it fits in the process flow

General reference — not yet source-verified

The RDS 6000 performs diffusion processes that modify the electrical properties of the wafer by introducing dopant atoms.

Applications

General reference — not yet source-verified

The RDS 6000 is used for diffusion processes in semiconductor wafer manufacturing.

What do the numbers mean?

Power & electrical6

Frequency: 50 Hz^[2]
Power: 67 KW^[2]; 3x400 V^[2]
Electrical frequency: 50 Hz^[2]
Power consumption: 67 kW^[2]
Voltage: 3x400 V^[2]

Configuration & options4

98 A^[2]
Vintage (year of manufacture): 2022^[2]
Vintage (year of manufacture): 2023^[1]
Current rating: 98 A^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency50 Hz^[2]
Power67 KW^[2]
Configuration3x400 V^[2]
Electrical frequency50 Hz^[2]
Power consumption67 kW^[2]
Voltage3x400 V^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the Rehm RDS 6000?

It is a cure oven identified with the Rehm make and RDS 6000 model designation.^[1]^[2]

Not publicly documented

The following facts about the RDS 6000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RDS 6000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RDS 6000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RDS 6000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RDS 6000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RDS 6000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]Inventory photo
[2]Inventory photo
[3]REHM RDS 6000 UV curing oven Used machines - Exapro — exapro.comexapro.com
[4]REHM RDS 6000, UC curing oven, vintage 2022 – Electrotech — electrotechsmt.comelectrotechsmt.com
[5]Used REHM RDS 6000 UV curing oven for sale — used-machines.comused-machines.com