Gamma2

The Rudolph Gamma2 is a connectivity and data-collection system used in semiconductor manufacturing control architectures. The Rudolph Gamma2 connects applications to tools for fault detection and run-to-run process control. The Rudolph Gamma2 communicates with semiconductor process tools with or without a SECS communication port.^[1]

The Rudolph Gamma2 uses a compact hardware platform with an X86 processor, Linux OS, and a hard drive. The Rudolph Gamma2 provides serial, ethernet, analog, and digital capabilities. The Rudolph Gamma2 collects data directly from equipment sensors. The Rudolph Gamma2 routes equipment data to a factory host or other applications. The Rudolph Gamma2 enables SECS-I to HSMS communication. The Rudolph Gamma2 adds applications to factory control architecture without changing host software.^[1]

Factory integration platforms sit alongside process tools rather than performing the wafer process step themselves. Factory integration platforms are used where equipment data must be captured, normalized, and delivered to control or analysis systems across the production line. Factory integration platforms therefore fit between process equipment operation and manufacturing execution, fault monitoring, or advanced process control functions.

The Rudolph Gamma2 is used for fault detection and run-to-run process control. The Rudolph Gamma2 supports equipment connectivity requirements ranging from protocol conversion to complex support for advanced process control.^[1]