Waferpedia

SCREEN

FL 820 L

SCREEN FL 820 L family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

SCREENFL 820 L
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What is it?

Applications

The SCREEN FL 820 L is used for nitride strip work on 8 inch wafers.[1][2]

What do the numbers mean?

Wafer handling1

Wafer size
8"[1]
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Configuration & options4

Nitride Strip[1]
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Manufacturer
SCREEN / DNS[1]
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Model
FL 820 L[1]
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Process
Nitride strip[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Who is the make of the FL 820 L?

The make is SCREEN / DNS.[1][2]

What model name is given for this equipment?

The model name is FL 820 L.[1][2]

Not publicly documented

The following facts about the FL 820 L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FL 820 L are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the FL 820 L are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the FL 820 L are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the FL 820 L are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the FL 820 L is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
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Last updated Oct 18, 2026.

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