Semitool
Equinox
What it is
The Semitool Equinox is a wet etch system used in semiconductor manufacturing.[2]
How it works
General reference — not yet source-verifiedA wet etch system removes material by exposing wafers to liquid chemistry rather than by dry plasma etching.
Spray and bath based wet process tools move process liquid across the wafer surface to control material removal, rinse behavior, and residue clearing.
Where it fits in the process flow
General reference — not yet source-verifiedWet etch equipment sits in the wafer process flow at a surface modification or pattern transfer step after earlier film formation and masking operations.
Applications
What do the numbers mean?
Wafer handling3
Gas & chemistry1
Configuration & options12
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Platform typeSpray solvent, metal lift-off platform[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many chambers does the system have?
The system has a four-chamber capacity.[1]
Not publicly documented
The following facts about the Equinox are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Equinox are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Equinox are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Equinox are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Equinox are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Equinox is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]web.archive.org — semitool.com (Sep 21, 2007)web.archive.org
Last updated Oct 13, 2026.
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