STEAG

Mecapol E 460

CMP 4"STEAG Mecapol E 460 family

Research Quality: 30% complete

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STEAGMecapol E 460

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Wafer size

Vacuum

2 pumps^[1]

What is it?

The Alpsitec E 460 CMP tool is described as a semi-automatic system for polishing and planarization of wafers. It is compatible with 4", 6", and 8" wafers, and can also process other wafer sizes or chips by bonding them to a carrier wafer. The tool has 2 slurry-delivery pumps and an ex-situ conditioning system.

What can it run?

Process applications and technology nodes documented for this tool.

oxide polishing
silicon polishing
metal polishing
silicon, polysilicon, and nitride polishing

Why won't it start?

Documented failure modes, common issues, and field considerations.

The source states: "This tool is not a micro-electronic compatible tool."

What do the numbers mean?

Vacuum & pumping1

Slurry delivery: 2 pumps^[1]

Wafer handling3

System type: semi-automatic system for polishing and planarization of wafers^[1]
Wafer compatibility: 4", 6", and 8" wafers^[1]
Other sample handling: other wafer sizes or chips can be processed by bonding them to a carrier wafer^[1]

Configuration & options1

Conditioning system: ex-situ conditioning system^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Slurry delivery2 pumps^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Mecapol E 460 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mecapol E 460 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mecapol E 460 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mecapol E 460 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Mecapol E 460 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Mecapol E 460 are on record.
Answerable by: an OEM parts catalog or a service engineer