STS
The STS 320 is a parallel-plate reactive ion etching (RIE) tool manufactured by Surface Technology Systems. The STS 320 is designed for etching silicon, silicon nitride, and transition metals using fluorine-based chemistries. The STS 320 uses an RF frequency of 13.56 MHz and has a driven electrode area of about 900 cm².[1]
Process applications and technology nodes documented for this tool.
Documented failure modes, common issues, and field considerations.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| STS 320 SF4 | — | — | Uses SF4 at 13.56 MHz, 100 mtorr, and is described as targeting silicon, silicon nitride, and transition metals with volatile fluorides. | nanocenter.umd.edu[1] |
| STS SF4 O2 | — | — | Uses SF4 and O2 at 13.56 MHz, 100 mtorr, and is described as increasing target-material etch rate while also increasing photoresist etch rate. | nanocenter.umd.edu[1] |
| STS 320 CF4 | — | — | Uses CF4 at 13.56 MHz, 100 mtorr, and is described as targeting silicon dioxide. | nanocenter.umd.edu[1] |
| STS CF4 O2 | — | — | Uses CF4 and O2 at 13.56 MHz, 100 mtorr, and is described as etching silicon nitride and silicon faster than oxide while reducing fluorocarbon buildup. | nanocenter.umd.edu[1] |
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
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The following facts about the 320 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 320 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 320 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 320 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 320 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 320 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Last updated Oct 11, 2026.