Lam Research
2300 e 4 Kiyo FX
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Lam Research 2300 e 4 Kiyo FX is a semiconductor etch system.[1]
How it works
General reference — not yet source-verifiedPlasma etch systems generate a plasma from a process gas within a vacuum chamber. The wafer is placed on a cathode that is biased with radio-frequency (RF) power to control the energy of ions striking the wafer surface. The energetic ions and reactive radicals remove material from the exposed areas of the dielectric layer.
Where it fits in the process flow
General reference — not yet source-verifiedThe Lam Research 2300 e 4 Kiyo FX is used in the etch step of semiconductor fabrication, following photolithography that has defined the pattern on the wafer. The etch process transfers the pattern into the underlying dielectric layer. Downstream steps typically include resist strip, cleaning, and metrology.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the 2300 e 4 Kiyo FX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the 2300 e 4 Kiyo FX are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 e 4 Kiyo FX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 e 4 Kiyo FX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 e 4 Kiyo FX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 e 4 Kiyo FX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Aug 26, 2026.