Sumitomo
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The Sumitomo SWA 93 GDA Laser Spike Annealer is a semiconductor wafer-processing tool used for thermal treatment by rapid laser heating.
A laser spike annealer heats selected regions of a wafer very rapidly for a short thermal cycle, allowing tight control of temperature exposure compared with conventional furnace processing. This class of tool is used to drive thermal changes in near-surface semiconductor layers while limiting broader heat diffusion into the substrate.
In a semiconductor line, a laser spike annealer sits in the thermal-processing stage after patterning or implant-related steps when brief, high-intensity heating is needed to modify electrical activation or repair process-induced damage.
It is generally used as a downstream step from wafer fabrication operations that create doped or otherwise altered surface layers, and upstream of subsequent metrology or finishing operations.
This class of equipment is used for rapid thermal treatment of semiconductor wafers, especially where localized heating and limited thermal budget are important.
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The following facts about the SWA 93 GDA Laser Spike Annealer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the SWA 93 GDA Laser Spike Annealer are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SWA 93 GDA Laser Spike Annealer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SWA 93 GDA Laser Spike Annealer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SWA 93 GDA Laser Spike Annealer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SWA 93 GDA Laser Spike Annealer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Jul 30, 2026.