SUSS MicroTec
MA 150 Mask
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedThe SUSS MicroTec MA 150 Mask Aligner is a lithography mask aligner used to transfer patterns from a photomask to a wafer in microfabrication.
How it works
General reference — not yet source-verifiedA mask aligner brings a photomask and a photoresist-coated wafer into precise relative position so the mask pattern can be exposed onto the wafer. In this class of equipment, alignment is performed optically, and exposure is then used to define the resist pattern for subsequent processing.
Where it fits in the process flow
General reference — not yet source-verifiedA mask aligner is used in the lithography step of wafer fabrication, after a substrate has been prepared with photoresist and before pattern transfer into underlying films or the substrate itself.
Applications
The SUSS MA 150 is suitable for six-inch wafer processing in top-side lithography.[1]
What do the numbers mean?
Configuration & options1
- top side[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the SUSS MA 150 Mask Aligner?
It is a lithography mask aligner.[1]
Not publicly documented
The following facts about the MA 150 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the MA 150 Mask are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 150 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 150 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 150 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 150 Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Jul 29, 2026.
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